CONTROL OF SOLID STATE DIMENSIONAL FEATURES

Details for Australian Patent Application No. 2002315497 (hide)

Owner PRESIDENT AND FELLOWS OF HARVARD COLLEGE

Inventors GOLOVCHENKO, Jene, A.; BRANTON, Daniel; AZIZ, Michael, J.; LI, Jiali; STEIN, Derek, M.; MCMULLAN, Ciaran, J.

Pub. Number AU-A-2002315497

PCT Number PCT/US02/20734

PCT Pub. Number WO2003/003446

Priority 60/301,400 27.06.01 US

Filing date 27 June 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 60/301,400 27.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315497

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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