ARRANGEMENT COMPRISING A SUPPORT BODY WITH A SUBSTRATE HOLDER MOUNTED THEREON ON A GAS BEARING WITH ROTATING DRIVE

Details for Australian Patent Application No. 2002315307 (hide)

Owner AIXTRON AG

Inventors STRAUCH, Gerd

Pub. Number AU-A-2002315307

PCT Number PCT/EP02/04406

PCT Pub. Number WO2002/097867

Priority 101 35 151.8 19.07.01 DE; 101 26 274.4 29.05.01 DE

Filing date 22 April 2002

Wipo publication date 9 December 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C30B 025/12 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Substrate holders or susceptors

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 101 35 151.8 19.07.01 DE; 101 26 274.4 29.05.01 DE

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315307

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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