RECONFIGURABLE APPARATUS FOR INSPECTION DURING A MANUFACTURING PROCESS AND RELATED METHOD

Details for Australian Patent Application No. 2002315210 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventors KOREN, Yoram; KATZ, Reuven

Pub. Number AU-A-2002315210

PCT Number PCT/US02/19212

PCT Pub. Number WO2003/106977

Filing date 14 June 2002

Wipo publication date 31 December 2003

International Classifications

G01N 021/00 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01M 019/00 Testing of structures or of apparatus, not provided for in the other groups of this subclass

H01L 027/00 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

G01C 021/02 Navigation - by astronomical means

G01J 001/42 Photometry, e.g. photographic exposure meter - using electric radiation detectors

Event Publications

2 January 2003 Complete Application Filed

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2002315210

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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