FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDING MANIPULATION OF REMOVAL RATE PROFILES

Details for Australian Patent Application No. 2002315181 (hide)

Owner APPLIED MATERIALS, INC.

Inventors PRABHU, Gopalakrishna, B.; SHANMUGASUNDRAM, Arulkumar, P.; SCHWARM, Alexander, T.

Pub. Number AU-A-2002315181

PCT Number PCT/US02/19063

PCT Pub. Number WO2002/103777

Priority 09/943,955 31.08.01 US; 60/298,878 19.06.01 US

Filing date 17 June 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/943,955 31.08.01 US; 60/298,878 19.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315181

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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