PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR

Details for Australian Patent Application No. 2002315171 (hide)

Owner ASHLAND INC.

Inventors KNEER, Emil, A.

Pub. Number AU-A-2002315171

PCT Number PCT/US02/19034

PCT Pub. Number WO2003/002688

Priority 09/893,968 29.06.01 US

Filing date 17 June 2002

Wipo publication date 3 March 2003

International Classifications

C09K 013/00 Etching, surface-brightening or pickling compositions

C09K 013/06 Etching, surface-brightening or pickling compositions

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/461 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/893,968 29.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315171

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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