A SILICA AND A SILICA-BASED SLURRY

Details for Australian Patent Application No. 2002315067 (hide)

Owner PPG INDUSTRIES OHIO, INC.

Inventors LI, Yuzhuo; SATISH, Narayanan; HELLRING, Stuart, D.; MC CANN, Colin, P.; BABU, Suryadevara, V.

Pub. Number AU-A-2002315067

PCT Number PCT/US02/18575

PCT Pub. Number WO2002/102920

Priority 09/882,549 14.06.01 US

Filing date 13 June 2002

Wipo publication date 2 January 2003

International Classifications

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

C01B 033/12 Silicon

C01B 033/193 Silicon

C09G 001/02 Polishing compositions

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/882,549 14.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002315067

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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