ELECTROSTATIC INTERACTION SYSTEMS AND METHODS THEREOF

Details for Australian Patent Application No. 2002314984 (hide)

Owner ROCHESTER INSTITUTE OF TECHNOLOGY

Inventors POTTER, Michael, D.

Pub. Number AU-A-2002314984

PCT Number PCT/US02/18184

PCT Pub. Number WO2002/101807

Priority 60/297,327 11.06.01 US

Filing date 7 June 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/30 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/46 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 60/297,327 11.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002314984

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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