CERAMIC ELECTROSTATIC CHUCK ASSEMBLY AND METHOD OF MAKING

Details for Australian Patent Application No. 2002314971 (hide)

Owner LAM RESEARCH CORPORATION

Inventors NAKAJIMA, Shu; BENJAMIN, Neil

Pub. Number AU-A-2002314971

PCT Number PCT/US02/18093

PCT Pub. Number WO2003/003449

Priority 09/892,634 28.06.01 US

Filing date 10 June 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/892,634 28.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002314971

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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