APPARATUS AND METHOD OF MAKING A SLIP FREE WAFER BOAT

Details for Australian Patent Application No. 2002314906 (hide)

Owner SAINT-GOBAIN CERAMICS AND PLASTICS, INC.

Inventors HENGST, Richard, R.

Pub. Number AU-A-2002314906

PCT Number PCT/US02/17654

PCT Pub. Number WO2002/103759

Priority 09/884,720 19.06.01 US

Filing date 5 June 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/884,720 19.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002314906

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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