METHOD AND STRUCTURE FOR BURIED CIRCUITS AND DEVICES

Details for Australian Patent Application No. 2002314900 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors CAMPBELL, John, E.; DEVINE, William, T.; SRIKRISHAN, kris. V.

Pub. Number AU-A-2002314900

PCT Number PCT/US02/17593

PCT Pub. Number WO2002/101825

Priority 09/879,530 12.06.01 US

Filing date 4 June 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/8242 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/84 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/879,530 12.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002314900

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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