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Details for Australian Patent Application No. 2002314875 (hide)

Owner LAM RESEARCH CORPORATION

Inventors MACGEARAILT, Niall

Pub. Number AU-A-2002314875

PCT Number PCT/US02/17386

PCT Pub. Number WO2002/101784

Priority 60/296,832 07.06.01 US; 10/028,312 28.12.01 US

Filing date 4 June 2002

Wipo publication date 23 December 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 60/296,832 07.06.01 US; 10/028,312 28.12.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002314875

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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