METHOD AND APPARATUS FOR PLASMA GENERATION

Details for Australian Patent Application No. 2002314660 (hide)

Owner CHEMFILT R AND D AKTIEBOLAG

Inventors KOUZNETSOV, Vladimir

Pub. Number AU-A-2002314660

PCT Number PCT/SE02/01160

PCT Pub. Number WO2002/103078

Priority 0102134-4 14.06.01 SE

Filing date 14 June 2002

Wipo publication date 2 January 2003

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H05H 001/50 Generating plasma

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 0102134-4 14.06.01 SE

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002314660

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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