HIGH-SENSITIVITY OPTICAL SCANNING USING MEMORY INTEGRATION

Details for Australian Patent Application No. 2002314502 (hide)

Owner ORBOTECH LTD.

Inventors KATZIR, Yigal; GUR-ARIE, Itay; MALINOVICH, Yacov

Pub. Number AU-A-2002314502

PCT Number PCT/IL02/00501

PCT Pub. Number WO2003/001189

Priority 60/299,766 22.06.01 US

Filing date 23 June 2002

Wipo publication date 8 January 2003

International Classifications

G01N 021/88 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating the presence of flaws, defects or contamination

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 60/299,766 22.06.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002314502

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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