METHOD AND APPARATUS FOR MICRO-JET ENABLED, LOW ENERGY ION GENERATION AND TRANSPORT IN PLASMA PROCESSING

Details for Australian Patent Application No. 2002313697 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors SAKTHIVEL, Palani; SAWIN, Herbert; SRIVASTAVA, Aseem

Pub. Number AU-A-2002313697

PCT Number PCT/US02/23232

PCT Pub. Number WO2003/007326

Priority 09/905,043 13.07.01 US

Filing date 12 July 2002

Wipo publication date 29 January 2003

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/905,043 13.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002313697

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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