METHOD AND DEVICE FOR GENERATING EXTREME ULTRAVIOLET RADIATION IN PARTICULAR FOR LITHOGRAPHY

Details for Australian Patent Application No. 2002313018 (hide)

Owner COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventors SCHMIDT, Martin; SUBLEMONTIER, Olivier; CECCOTTI, Tiberio; SEGERS, Marc

Pub. Number AU-A-2002313018

PCT Number PCT/FR02/01306

PCT Pub. Number WO2002/085080

Priority 01/05241 18.04.01 FR

Filing date 16 April 2002

Wipo publication date 28 October 2002

International Classifications

H05G 002/00 Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 01/05241 18.04.01 FR

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002313018

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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