HIGH-APERTURE PROJECTION LENS

Details for Australian Patent Application No. 2002312872 (hide)

Owner CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

Inventors SCHUSTER, Karl-Heinz

Pub. Number AU-A-2002312872

PCT Number PCT/EP02/04846

PCT Pub. Number WO2003/077036

Priority 102 10 899.4 08.03.02 DE

Filing date 3 May 2002

Wipo publication date 22 September 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 102 10 899.4 08.03.02 DE

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2002312872

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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