METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

Details for Australian Patent Application No. 2002312002 (hide)

Owner UNIT INSTRUMENTS, INC.

Inventors LULL, John, M.; VALENTINE, William, S.

Pub. Number AU-A-2002312002

PCT Number PCT/US02/16289

PCT Pub. Number WO2002/095519

Priority 60/293,356 24.05.01 US

Filing date 23 May 2002

Wipo publication date 3 December 2002

International Classifications

G05D 007/06 Control of flow - characterised by the use of electric means

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 60/293,356 24.05.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002312002

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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