MANUFACTURE OF SEMICONDUCTOR DEVICE WITH SPACING NARROWER THAN LITHOGRAPHY LIMIT

Details for Australian Patent Application No. 2002311866 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors YANG, Jean, Yee-Mei; WU, Yider; KIM, UnSoon; SUN, Yu

Pub. Number AU-A-2002311866

PCT Number PCT/US02/13578

PCT Pub. Number WO2003/030230

Priority 09/966,637 28.09.01 US

Filing date 30 April 2002

Wipo publication date 14 April 2003

International Classifications

H01L 021/033 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/308 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/966,637 28.09.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002311866

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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