SILICON FIXTURES USEFUL FOR HIGH TEMPERATURE WAFER PROCESSING

Details for Australian Patent Application No. 2002311863 (hide)

Owner INTEGRATED MATERIALS, INC.

Inventors BOYLE, James, E.; MYTTON, Robert, W.; ZEHAVI, Raanan

Pub. Number AU-A-2002311863

PCT Number PCT/US02/13479

PCT Pub. Number WO2002/095807

Priority 09/860,392 18.05.01 US; 09/965,106 26.09.01 US

Filing date 30 April 2002

Wipo publication date 3 December 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 09/860,392 18.05.01 US; 09/965,106 26.09.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002311863

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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