OPTICAL SYSTEM AND EXPOSURE SYSTEM PROVIDED WITH THE OPTICAL SYSTEM

Details for Australian Patent Application No. 2002311268 (hide)

Owner NIKON CORPORATION

Inventors SHIRAISHI, Naomasa; OMURA, Yasuhiro

Pub. Number AU-A-2002311268

PCT Number PCT/JP02/06131

PCT Pub. Number WO2003/001271

Priority 2001-185825 20.06.01 JP; 2001-206935 06.07.01 JP

Filing date 19 June 2002

Wipo publication date 8 January 2003

International Classifications

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001-185825 20.06.01 JP; 2001-206935 06.07.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002311268

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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