DRY-ETCCHING METHOD

Details for Australian Patent Application No. 2002311155 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors IIJIMA, Ethuo; YAMADA, Norikazu

Pub. Number AU-A-2002311155

PCT Number PCT/JP02/05637

PCT Pub. Number WO2002/103773

Priority 2001-182193 15.06.01 JP; 2001-319755 17.10.01 JP

Filing date 7 June 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001-182193 15.06.01 JP; 2001-319755 17.10.01 JP

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002311155

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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