STRUCTURE AND METHOD OF FABRICATING EMBEDDED VERTICAL DRAM ARRAYS WITH SILICIDED BITLINE AND POLYSILICON INTERCONNECT

Details for Australian Patent Application No. 2002310537 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors NESBIT, Larry; RADENS, Carl; DIVAKARUNI, Ramachandra; GRUENING, Ulrike; MANDELMAN, Jack

Pub. Number AU-A-2002310537

PCT Number PCT/GB02/02961

PCT Pub. Number WO2003/005447

Priority 09/897,868 02.07.01 US

Filing date 27 June 2002

Wipo publication date 21 January 2003

International Classifications

H01L 027/108 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Dynamic random access memory structures

H01L 021/8242 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/897,868 02.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002310537

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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