Fluoropolymer interlayer dielectric by chemical vapor deposition

Details for Australian Patent Application No. 2002310491 (hide)

Owner E.I. DU PONT DE NEMOURS AND COMPANY

Inventors Feiring, Andrew E.; Lopata, Eugene; Brichko, Yakov; Rose, Peter; Treat, Theodore A.; Mocella, Michael

Agent Callinan

Pub. Number AU-A-2002310491

PCT Number PCT/US02/19702

PCT Pub. Number WO2004/001832

Filing date 21 June 2002

Wipo publication date 6 January 2004

International Classifications

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05D 005/08 Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures - to obtain an anti-friction or anti-adhesive surface

Event Publications

19 December 2002 Complete Application Filed

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2002310491

8 October 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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