INTEGRATED TOOLS WITH TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES

Details for Australian Patent Application No. 2002310331 (hide)

Owner SEMITOOL, INC.

Inventors WOODRUFF, Daniel, J.; HARRIS, Randy

Pub. Number AU-A-2002310331

PCT Number PCT/US02/17840

PCT Pub. Number WO2002/099165

Priority 09/875,428 05.06.01 US

Filing date 4 June 2002

Wipo publication date 16 December 2002

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/875,428 05.06.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002310331

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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