SCANNING INTERFEROMETRY WITH REFERENCE SIGNAL

Details for Australian Patent Application No. 2002310316 (hide)

Owner VEECO INSTRUMENTS, INC.

Inventors OLSZAK, Arthur; SCHMIT, Joanna

Pub. Number AU-A-2002310316

PCT Number PCT/US02/17723

PCT Pub. Number WO2003/001145

Priority 09/888,826 25.06.01 US

Filing date 5 June 2002

Wipo publication date 8 January 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/888,826 25.06.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002310316

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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