METHODS AND SYSTEMS FOR MONITORING PROCESS FLUIDS

Details for Australian Patent Application No. 2002310308 (hide)

Owner MATTSON TECHNOLOGY IP

Inventors CARTER, Christopher; BROWN, Karrie; DIBELLO, Gerald, N.

Pub. Number AU-A-2002310308

PCT Number PCT/US02/17703

PCT Pub. Number WO2002/099394

Priority 60/270,815 05.06.01 US; Not Given 04.06.02 US

Filing date 4 June 2002

Wipo publication date 16 December 2002

International Classifications

G01N 021/00 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/270,815 05.06.01 US; Not Given 04.06.02 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002310308

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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