APPLICATIONS OF A STRAINCOMPENSATED HEAVILY DOPED ETCH STOP FOR SILICON STRUCTURE FORMATION

Details for Australian Patent Application No. 2002310240 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors HORNING, Robert, D.; BURNS, David, W.

Pub. Number AU-A-2002310240

PCT Number PCT/US02/17216

PCT Pub. Number WO2002/098788

Priority 09/873,931 04.06.01 US

Filing date 4 June 2002

Wipo publication date 16 December 2002

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/873,931 04.06.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002310240

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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