ANTISTATIC OPTICAL PELLICLE

Details for Australian Patent Application No. 2002310175 (hide)

Owner MICRO LITHOGRAPHY, INC.

Inventors WANG, Ching-Bore

Pub. Number AU-A-2002310175

PCT Number PCT/US02/16833

PCT Pub. Number WO2002/097326

Priority 09/870,730 30.05.01 US

Filing date 29 May 2002

Wipo publication date 9 December 2002

International Classifications

F21V 009/04 Light filters

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/870,730 30.05.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002310175

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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