APPARATUS AND METHOD FOR SUBSTRATE PREPARATION IMPLEMENTING A SURFACE TENSION REDUCING PROCESS

Details for Australian Patent Application No. 2002309997 (hide)

Owner LAM RESEARCH CORPORATION

Inventors WELSH, Christopher, M.; MATSUMOTO, Jack, T.

Pub. Number AU-A-2002309997

PCT Number PCT/US02/15997

PCT Pub. Number WO2002/095809

Priority 60/292,059 18.05.01 US

Filing date 17 May 2002

Wipo publication date 3 December 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/292,059 18.05.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002309997

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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