FABRICATION OF BURIED DEVICES WITHIN A SEMICONDUCTOR STRUCTURE

Details for Australian Patent Application No. 2002309618 (hide)

Owner MOTOROLA, INC.

Inventors JOHNSON, Timothy, J.

Pub. Number AU-A-2002309618

PCT Number PCT/US02/13623

PCT Pub. Number WO2003/009356

Priority 09/907,707 19.07.01 US

Filing date 29 April 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/06 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including a plurality of individual components in a non-repetitive configuration

H01L 021/8258 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/907,707 19.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002309618

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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