PROCESS AND APPARATUS FOR REMOVING RESIDUES FROM THE MICROSTRUCTURE OF AN OBJECT

Details for Australian Patent Application No. 2002309489 (hide)

Owner KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.)

Inventors MASUDA, Kaoru; ILJIMA, Katsuyuki; SUZUKI, Tetsuo; KAWAKAMI, Nobuyuki; YAMAGATA, Masahiro; PETERS, Daryl, W.; EGBE, Matthew, I.

Pub. Number AU-A-2002309489

PCT Number PCT/US02/03608

PCT Pub. Number WO2002/080233

Priority 2001/034337 09.02.01 JP

Filing date 8 February 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

C11D 001/00 Surface-active non-soap detergents

C11D 003/37 Other compounding ingredients of detergent compositions covered in group - Polymers

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001/034337 09.02.01 JP

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002309489

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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