MULTI-LAYER MIRROR FOR RADIATION IN THE XUV WAVELENGHT RANGE AND METHOD FOR MANUFACTURE THEREOF

Details for Australian Patent Application No. 2002309334 (hide)

International Classifications

Event Publications

19 December 2002 Complete Application Filed

Priority application(s): 1018139 23.05.01 NL

8 May 2003 Application Open to Public Inspection

Published as AU-A-2002309334

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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