APPARATUS AND METHOD FOR CLEANING THE SURFACE OF A SUBSTRATE

Details for Australian Patent Application No. 2002309315 (hide)

Owner SEM TECHNOLOGY CO., LTD. LEE, Hag-Joo

Inventors LEE, Hag-Joo

Pub. Number AU-A-2002309315

PCT Number PCT/KR02/01124

PCT Pub. Number WO2002/103770

Priority 2001-0034017 15.06.01 KR

Filing date 14 June 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001-0034017 15.06.01 KR

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002309315

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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