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Details for Australian Patent Application No. 2002308595 (hide)

Owner LAM RESEARCH CORPORATION

Inventors DAUGHERTY, John, E.; ULLAL, Saurabh, J.; SINGH, Harmeet

Pub. Number AU-A-2002308595

PCT Number PCT/US02/14102

PCT Pub. Number WO2002/091453

Priority 60/288,681 04.05.01 US

Filing date 3 May 2002

Wipo publication date 18 November 2002

International Classifications

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/288,681 04.05.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002308595

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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