METHOD AND APPARATUS FOR CHARACTERIZATION OF ULTRATHIN SILICON OXIDE FILMS USING MIRROR-ENHANCED POLARIZED REFLECTANCE FOURIER TRANSFORM INFRARED SPECTROSCOPY

Details for Australian Patent Application No. 2002308516 (hide)

Owner THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

Inventors TAKOUDIS, Christos, G.; CUI, Zhenjiang

Pub. Number AU-A-2002308516

PCT Number PCT/US02/13460

PCT Pub. Number WO2002/088683

Priority 60/287,461 30.04.01 US

Filing date 29 April 2002

Wipo publication date 11 November 2002

International Classifications

G01N 021/35 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/287,461 30.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002308516

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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