METHOD FOR CONTROLLING A PROCESS IN A MULTI-ZONAL APPARATUS

Details for Australian Patent Application No. 2002308496 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors KOROVIN, Nikolay, N.

Pub. Number AU-A-2002308496

PCT Number PCT/US02/13305

PCT Pub. Number WO2002/087826

Priority 09/846,965 01.05.01 US

Filing date 26 April 2002

Wipo publication date 11 November 2002

International Classifications

B24B 041/06 Component parts of general applicability for grinding machines or devices - Work supports, e.g. adjustable steadies

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/16 Measuring - taking regard of the load

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/846,965 01.05.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002308496

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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