APPARATUS AND METHOD FOR THE DEPOSITION OF METAL OR METAL OXIDE COATINGS ON AN ELONGATED SUBSTRATE

Details for Australian Patent Application No. 2002308145 (hide)

Owner N.V. BEKAERT S.A.

Inventors DENUL, Jurgen; DE GRYSE, Roger; SEGERS, Anneke; LIEVENS, Hugo

Pub. Number AU-A-2002308145

PCT Number PCT/EP02/04241

PCT Pub. Number WO2002/086188

Priority 01201427.0 20.04.01 EP

Filing date 17 April 2002

Wipo publication date 5 November 2002

International Classifications

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

H01L 039/24 Devices using superconductivity or hyperconductivity - Processes or apparatus specially adapted for the manufacture or treatment of devices provided for in group or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 01201427.0 20.04.01 EP

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002308145

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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