A METHOD OF FILLING A VIA OR RECESS IN A SEMICONDUCTOR SUBSTRATE

Details for Australian Patent Application No. 2002308014 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors MACNEIL, John

Pub. Number AU-A-2002308014

PCT Number PCT/GB02/01847

PCT Pub. Number WO2002/089199

Priority 0110241.7 26.04.01 GB

Filing date 22 April 2002

Wipo publication date 11 November 2002

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 0110241.7 26.04.01 GB

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002308014

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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