MICRO PIEZOELECTRIC ACTUATOR AND METHOD FOR FABRICATING SAME

Details for Australian Patent Application No. 2002307709 (hide)

Owner M2N INC.

Inventors HWANG, Kyu-Ho

Pub. Number AU-A-2002307709

PCT Number PCT/KR02/00701

PCT Pub. Number WO2002/084753

Priority PCT/KR01/00632 17.04.01 KR

Filing date 17 April 2002

Wipo publication date 28 October 2002

International Classifications

H01L 041/09 Piezo-electric elements in general -

G02F 003/00 Optical logic elements

H04B 010/02 Transmission systems employing beams of corpuscular radiation, or electromagnetic waves other than radio waves, e.g. light, infra-red - Details

H01L 041/22 Piezo-electric elements in general - Processes or apparatus specially adapted for the manufacture or treatment of these elements or of parts thereof

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

G02B 026/00 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating

G02F 001/29 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating - for the control of the position or the direction of light beams, i.e. deflection

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): PCT/KR01/00632 17.04.01 KR

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002307709

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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