SYSTEM AND METHOD FOR SCHEDULING THE MOVEMENT OF WAFERS IN A WAFER-PROCESSING TOOL

Details for Australian Patent Application No. 2002307537 (hide)

Owner TOKYO ELECTRON, LTD.

Inventors JOMA, Kentaro; OGI, Tatsuya

Pub. Number AU-A-2002307537

PCT Number PCT/US02/12964

PCT Pub. Number WO2002/088859

Priority 09/844,582 26.04.01 US

Filing date 26 April 2002

Wipo publication date 11 November 2002

International Classifications

G05B 019/418 Programme-control systems - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/844,582 26.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002307537

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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