IMPROVED FAN FOR GAS DISCHARGE LASER

Details for Australian Patent Application No. 2002307425 (hide)

Owner CYMER, INC.

Inventors RETTIG, Curtis, L.; PARTLO, William, N.

Pub. Number AU-A-2002307425

PCT Number PCT/US02/12417

PCT Pub. Number WO2002/093703

Priority 09/854,097 11.05.01 US; 10/029,319 17.10.01 US

Filing date 18 April 2002

Wipo publication date 25 November 2002

International Classifications

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/854,097 11.05.01 US; 10/029,319 17.10.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002307425

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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