FOUR KHz GAS DISCHARGE LASER SYSTEM

Details for Australian Patent Application No. 2002307368 (hide)

Owner CYMER, INC.

Inventors UJAZDOWSKI, Richard, C.; ROKNI, Shahryar; SMITH, Scott; ANDERSON, Stuart, L.; ALGOTS, John, M.; SPANGLER, Ronald, L.; FOMENKOV, Igor; STEIGER, Thomas, D.; EMILO, Jerome, A.; TITUS, Clay, C.; IVASCHENKO, Alex, P.; ZAMBON, Paolo; PADMABANDU, Gamaralalage, G.; BRANHAM, Mark, S.; PHATAK, Sanjay; CYBULSKI, Raymond; WITTAK, Christian, J.; PARTLO, William, N.; SANDSTROM, Richard, L.; MELCHER, Paul, C.; JOHNS, David, M.; SAETHRE, Robert, B.; NESS, Richard, M.; RETTIG, Curtis, L.; SHANNON, Robert, A.

Pub. Number AU-A-2002307368

PCT Number PCT/US02/12062

PCT Pub. Number WO2002/093699

Priority 10/029,319 17.10.01 US; 10/000,991 14.11.01 US; 10/012,002 30.11.01 US; 10/036,676 21.12.01 US; 09/854,097 11.05.01 US; 09/943,343 29.08.01 US

Filing date 15 April 2002

Wipo publication date 25 November 2002

International Classifications

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

H01S 003/04 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Cooling arrangements

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 10/029,319 17.10.01 US; 10/000,991 14.11.01 US; 10/012,002 30.11.01 US; 10/036,676 21.12.01 US; 09/854,097 11.05.01 US; 09/943,343 29.08.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002307368

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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