ANTI-REFLECTIVE COATING AND METHODS OF MAKING THE SAME

Details for Australian Patent Application No. 2002307274 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors SUN, Sey-Ping; BROWN, David, E.; LAM, Kin-Sang

Pub. Number AU-A-2002307274

PCT Number PCT/US02/11555

PCT Pub. Number WO2002/099857

Priority 09/875,681 06.06.01 US

Filing date 11 April 2002

Wipo publication date 16 December 2002

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/09 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - characterised by structural details, e.g. supports, auxiliary layers

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/875,681 06.06.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002307274

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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