METHOD OF FABRICATING MICROMACHINED DEVICES

Details for Australian Patent Application No. 2002307199 (hide)

Owner UMACHINES, INC.

Inventors TSAO, Tom; JIANG, Fukang; DICKSON, Jeff; TAI, Yu-Chong; CHIU, Chen-Wei; AVAKIAN, Aramais

Pub. Number AU-A-2002307199

PCT Number PCT/US02/11096

PCT Pub. Number WO2002/088822

Priority 09/843,025 25.04.01 US

Filing date 5 April 2002

Wipo publication date 11 November 2002

International Classifications

G02B 026/00 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/843,025 25.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002307199

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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