SUPPORT FOR A POLISHING BELT

Details for Australian Patent Application No. 2002306983 (hide)

Owner LAM RESEARCH CORPORATION

Inventors XU, Cangshan; GASPARITSCH, Jeff; TAFF, Robert; BAHNG, Kenneth, J.; STASIEWICZ, Paul; ENGDAHL, Erik, H.; TAYLOR, Travis, Robert

Pub. Number AU-A-2002306983

PCT Number PCT/US02/09858

PCT Pub. Number WO2002/078904

Priority 09/823,722 30.03.01 US; 10/029,958 21.12.01 US

Filing date 29 March 2002

Wipo publication date 15 October 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 021/04 Machines or devices using grinding or polishing belts - for grinding plane surfaces

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/823,722 30.03.01 US; 10/029,958 21.12.01 US

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002306983

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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