INJECTION SEEDED F2 LASER WITH WAVELENGTH CONTROL

Details for Australian Patent Application No. 2002306940 (hide)

Owner CYMER, INC.

Inventors PARTLO, William, N.; ERSHOV, Alexander, I.; ONKELS, Eckehard, D.; OH, Choonghoon; SANDSTROM, Richard, L.; NESS, Richard, M.

Pub. Number AU-A-2002306940

PCT Number PCT/US02/09625

PCT Pub. Number WO2002/082601

Priority 09/829,475 09.04.01 US; 09/848,043 03.05.01 US; 09/854,097 11.05.01 US; 09/855,310 14.05.01 US

Filing date 29 March 2002

Wipo publication date 21 October 2002

International Classifications

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/14 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - characterised by the material used as the active medium

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

H01S 003/00 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/097 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - by gas discharge of a gas laser

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/829,475 09.04.01 US; 09/848,043 03.05.01 US; 09/854,097 11.05.01 US; 09/855,310 14.05.01 US

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002306940

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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