VACUUM PLASMA PROCESSOR AND METHOD OF OPERATING SAME

Details for Australian Patent Application No. 2002306930 (hide)

Owner LAM RESEARCH CORPORATION

Inventors ENNIS, Gerard

Pub. Number AU-A-2002306930

PCT Number PCT/US02/09585

PCT Pub. Number WO2002/080265

Priority 09/821,026 30.03.01 US

Filing date 29 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/821,026 30.03.01 US

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002306930

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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