METHOD AND DEVICE FOR VIBRATION CONTROL

Details for Australian Patent Application No. 2002306892 (hide)

Owner CYMER, INC.

Inventors PLETNER, Baruch; KARPEL, Mordechay; DORN, Huckleberry, B.; PERKINS, Richard; LUBLIN, Leonard

Pub. Number AU-A-2002306892

PCT Number PCT/US02/09394

PCT Pub. Number WO2002/077484

Priority 60/278,810 26.03.01 US; 09/968,180 01.10.01 US; Not Given 22.03.02 US

Filing date 25 March 2002

Wipo publication date 8 October 2002

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/278,810 26.03.01 US; 09/968,180 01.10.01 US; Not Given 22.03.02 US

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002306892

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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