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Details for Australian Patent Application No. 2002306843 (hide)

Owner SEMITOOL, INC.

Inventors SCRANTON, Dana, R.

Pub. Number AU-A-2002306843

PCT Number PCT/US02/09049

PCT Pub. Number WO2002/076640

Priority 09/818,042 27.03.01 US

Filing date 8 March 2002

Wipo publication date 8 October 2002

International Classifications

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/818,042 27.03.01 US

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002306843

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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