METHOD AND APPARATUS FOR PROVIDING ELECTRICAL AND FLUID COMMUNICATION TO A ROTATION MICROELECTRONIC WORKPIECE DURING ELECTROCHEMICAL PROCESSING

Details for Australian Patent Application No. 2002306632 (hide)

Owner SEMITOOL, INC.

Inventors PEDERSON, John, M.; ERICKSON, James, J.

Pub. Number AU-A-2002306632

PCT Number PCT/US02/06390

PCT Pub. Number WO2002/070788

Priority 09/797,504 01.03.01 US

Filing date 28 February 2002

Wipo publication date 19 September 2002

International Classifications

C25D 005/00 Electroplating characterised by the process

C25D 017/16 Constructional parts, or assemblies thereof, of cells for electrolytic coating - Apparatus for electrolytic coating of small objects in bulk

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

C25C 007/00 Constructional parts, or assemblies thereof, of cells

C25B 009/00 Cells or assemblies of cells

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/797,504 01.03.01 US

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002306632

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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